Laminar Flow Bench
Laminar flow bench, Laminar flow cabinet is a enclosed bench designed to prevent contamination of semiconductor wafers, biological samples, or any particle sensitive materials. Air is drawn through a ULPAHEPA filter and blown down at a very low velocity.
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Air showers are specialized antechambers which personnel must pass through before entering cleanrooms in order to decontaminate. Decontamination is done by clearing off dust and dirt particles from bodies of cleanroom personnel to minimize contamination of equipment or products.
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