vent valves
Small orifice in the shut-off valves vents the mechanical pump to atmospheric pressure for easy restart when power resumes, Eliminate time consuming and costly cleanup of dirty vacuum lines, caused by oil backstreaming from the pump, Even when the mechanical pump is equipped with an anti-suckback valve, these valves are recommended because the pump’s integral valve will not vent the pump, Available in a variety of ISO-KF flange sizes, solenoid voltages, and frequencies.
...morevacuum valves
vacuum machine
These compact and extremely easy-to-operate rotary coarse vane pumps are designed for continuous operation over the working pressure range from atmosphere to less than 1 Torr (29.9 in. Hg), Integral demister in the oil casing filters oil aerosols and returns coalesced oil to the fluid sump, Relief valve prevents pressure buildup should the demisting filters become clogged.
...moreVacuum Gauge
Our liquid-filled bourdon vacuum gauges are industrial-grade dial gauges suitable for pressures down to 1 Torr (mbar). Bourdon tube constructed of phosphor bronze,Corrosion- and impact-resistant, industrial-grade Zytel nylon case, Removable Zytel nylon bezel design for easy calibration, Large 2-12" dial and non-yellowing clear glycerin fill for readability.
...moreVacuum Chambers
Tungsten Wire
Tungsten, also known as Wolfram, is one of the densest elements in the world. It has a density of 19.3 gcc, a melting point of 3,410°C, and a vapor pressure of 10-4 Torr at 2,757°C. It is lustrous and grayish-white in appearance. It is known to have the highest melting point of all metals and its characteristic hardness can make it very difficult to machine and forge in pure form. Tungsten is commonly used to make electric filaments. Tungsten carbide is found in drills, saws, and jewelry. Tungsten is evaporated under vacuum for the production of semiconductors, fuel cells, and sensors.
...moreSilicon O Rings
These replacement elastomeric o-rings are used (in conjunction with a centering ring -- not included) for sealing ISO flanges. The ISO flange (also called Large ISO) is used for HV chamber ports and is available in two distinct styles; ISO-K which uses clamp fasteners and ISO-F which uses nut and bolt fasteners. O-Rings available in Viton (fluorocarbon), Buna-N (nitrile rubber).
...moreSilicon Dioxide
Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations.Type of Bond Indium, Elastomer, Theoretical Density (gcc) ~2.65.
...moreSealing Wire
Wire seal flanges are sexed—with malefemale flanges forming a mating pair that captures an OFHC copper "o-ring" gasket under extreme compression. The material of choice is 304L stainless although 316L stainless may be available as a custom material. The flanges' design constrains the gasket's flow to form a seal between them. Wire seal flanges can be used over the same temperaturepressure ranges as CF flanges. They are used where tube dimensions exceed those of standard CF flanges.
...moreRotary Vane Pump
The pumps employ an innovative frequency converter technology that delivers optimal and consistent performance under any combination of input power voltage and frequency, worldwide.
...morePyrex tube
Glass to metal tube adapters (seals) use a graded glass seal to join a metal tube to a glass tube. They are often used to observe a process or to provide electrical isolation.
...morePtfe Tubes
PTFE tubing with Swagelok Cajon® fittings. Ideal for use as electrically isolated water lines in a vacuum system between various components, manifolds, chillers, etc.
...morePneumatic Gate Valve
Valves handle applications in semiconductor and other processing, and are used most often to isolate pumps and sample entry locks from HV or UHV work chambers.
...morePlate Nuts
Threaded rods (studs) are for SI tapped CF flanges. Applications include:connect double-sided flanges; make bolts “emerge’’ from blind-tapped flanges, and mount protective plastic covers over glass viewports. Plate nuts are for clearance (through-hole) CF flanges. They are metal plates with 2-threaded holes, shaped to match the corresponding CF flange's bolt hole patterns and replace the individual nuts. The plate nut’s major advantage is, once two bolts are manually started, the plate nut acts as its own backing wrench and washer—the bolts are tightened using one wrench.
...moreOil Mist Eliminator
All filter elements have a two-stage construction consisting of multiple layer of fine wire screen and a special non-organic fibe Removes particles and droplets to the 0.3 micron size, Element enables for easy replacement when loaded with oil,Any oil run-off from the filter while in use returns to the pump
...moreMist Eliminators
Operates at 99.97% removal efficiency at 0.3 micron diameter particles with maximum inlet concentration of 500 ppmw (parts per million by wt.) mineral oil or 1,000 ppmw synthetic oil, Low-profile, compact open-body design with a high coalescing media, Works between 4°C and 104°C.
...moreMetal Bellows
We fabricate these tube end (tubulated) edge-welded bellows for UHV systems from 347 stainless steel hoses. In contrast to hydraulically formed metal hoses, edge-welded bellows are very flexible and tend to spring back to their natural length (typically midway between their extended and compressed lengths) when not under vacuum.
...moremass flow controllers
mass flow controller instruments measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing.Mass Flow Controllers (MFCs) and Mass Flow Meters (MFMs) from MKS Instruments are available with either analog or digital communication, and with elastomer or metal seals. Analog mass flow controllers and mass flow meters are ideal for basic applications, offering high performance in a simple and cost effective package. Digital mass flow controller and mass flow meter devices offer several advantages over analog mass flow controllers and mass flow meters – improved diagnostic capabilities, multi-gas capability in a single package and multi-range capability for reduced spares requirement and overall lower cost of ownership.
...morehollow shaft
Cartridge mounted ferrofluid rotary feedthroughs can replace existing vacuum shafts or spindles which use dynamic o-ring seals (defined as o-ring seals which press against a moving surface).
...moreHigh Vacuum Pump
This oil-free vacuum pump is the smallest scroll pump made for general vacuum applications. It produces a pump speed of 60 litersmin. with base pressure of 250 millitorr, Hermetic design with fully isolated motor and bearings, No mechanisms subject to catastrophic failure.
...moreHigh Vacuum Grease
Low volatility over a wide temperature range. Lubricates synthetic and silicone rubber gaskets for high-temperature rough-vacuum grease uses, Unaffected by vegetable oils, mineral oils, and common gases, and resists most aqueous solutions of inorganic salts Used in chemical plants to lubricate plug valves, flow meter bearings, ceramic plug cocks, water treatment equipment, and fire extinguisher valves
Color : Light Gray
...moreHexagon Head Bolt
These bolt sets fit clearance (through-hole) CF flanges. Unless otherwise noted, they include 25 bolts, 25 nuts, and 50 washers.
Length : 20,22,35
...moreHeat Transfer Fluid
Ideal fluids for applications with component immersion, wafer etching, ion implantation, radar equipment, transformers, power supplies, UF6 production, chillers, cooling towers, and freeze dryers, Perfluorinated, inert polyethers have a high resistance to oxidation and thermal degradation, Compatible with metals, ceramics, plastics, and elastomers, Fluids have low viscosity, no hydrogen in the molecular structure, and low water absorption.
...moreflow controllers
The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, or DeviceNet™ IO. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. IO protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet™ versions of the MKS 1179A MFC with minor coding. A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements.
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