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Thin Film Coating System
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FEATURES Large range: BAK UNI for custom University Applications to BAK 2000, a production giant Advanced Process Control offers full automation through Pump-down, Process, Venting and Data-logging stages. Platform Geometry options: Standard throw, Lift Off, Split Chamber, Rear Extension Choose from a large range of sources- Thermal Evaporation, E Guns, Wire Feeder, Barrel Source, Effusion Cells, Sputter, PIAD, Etch, Heating and Glow Discharge Quartz Monitoring: Single, 6 and 12-way quartz with increased sampling rates for termination accuracy in single and co-deposition processes. Custom tooling solutions, designed to maximize batch capacity for evaporation processes without compromise on film quality Applications DLC Coating: Evatec brings conventional PVD and PECVD processes together in the BAK evaporator to enable high performance protected AR coatings on Si or Ge. Single and multiple bandpass filters for laser, 3D and photonics applications Front and Back Metals in Power Devices: Evatec's planetary handling and flip systems offer cost effective deposition of thick front side aluminium or rear side contact stacks in single or double sided processes on the BAK Evaporator.
