Electric Diffusion Furnaces
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Diffusion furnaces
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MRL is the brand for Sandvik's semiconductor and solar industry-related heating products. The MRL program also covers a range of other thermal processing equipment.
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MRL DIFFUSION FURNACES
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MRL is the brand for Sandvik's semiconductor and solar industry-related heating products. The MRL program also covers a range of other thermal processing equipment.
Diffusion furnaces
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Diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life. Furnace Cabinet: Unitized structural steel assembly Hinged, locking and removable element access doors Thermally insulated enclosure paneling High temperature Urethane coating Easy-to-adjust element alignment supports Cabinet overtemperature interlock sensor Leveling pads and optional seismic brackets Toxic Gas Scavenger: Stainless steel construction Vents gases and heat from process tube or chamber Indepently adjustable exhaust draw per tube-level Cantilever closure or manual door sealing per tube-level LPCVD flange and gas line fitting mounting scheme Differential pressure gauge to monitor exhaust draw Air-to-water Heat Exchanger: Used to vent heated air from furnace cabinet top HVAC control of furnace room Water-cooled, high efficiency radiator Air baffle paneling to direct air flow through cabinet Exhaust fan module for air exhaust draw Power Distribution: Located within base of furnace cabinet Encloses transformers, terminals and wire bussing Encloses temperature controls and contactors/breakers Easy accessibility to components Pull down panels for easy access to control modules EMO safety controls Reduncant overtemperature interlock per element zone Element Kits: Elements Low temperature range element 350 to 900oC Mid temperature range element 600 to 1200oC High temperature range element 600 to 1350oC +/- 0.5oC tolerance 600 to 1350oC range +/- 1.0oC tolerance 350 to 600oC range Vacuum formed high purity alumina insulation Stainless steel shroud Helical windings with captive spacing Control and overtemperature TC spikes per zone TC wire channel TC holding and alignment clips Energy Kits High purity alumina vestibule blocks NEXTEL soft collars Stainless steel capture rings, plates and collars Power Controls: High efficiency digital SSR/SCR firing circuitry Power control and circuit protection with EMO NEC-grade wiring Easy accessibility to components Main and control power disconnect contactors Individual element power contactors and resets Illuminated power indicators Redundant overtemperature interlocks 208, 380, 415, 480VAC main power, 50 or 60Hz
Diffusion furnaces
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Diffusion furnaces, wet chemical solutions, metallization techniques
Diffusion Furnace
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Diffusion Furnace
Diffusion furnaces
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Diffusion furnaces, Load and haul equipment, grey cast iron
Diffusion furnaces
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Diffusion furnaces, Load and haul equipment, press plates, Steel Belts
Diffusion furnaces
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Diffusion furnaces, Spring Less Diaphragm Valves, Chamber Kilns
MLR Diffusion Furnaces
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MLR Diffusion Furnaces, Rotoform Granulation Systems, Tailor Tools
Diffusion furnaces
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Diffusion furnaces, Aerospace Components, aluminum extrusion billet
Diffusion furnaces
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Diffusion furnaces, Load and haul equipment, press plates
